Semiconductor Processes

Lighting plays an important role across the entire semiconductor manufacturing process. LEDs, light pipes and lasers are integrated into turn-key Light Engines, offering specific advantages in support of semiconductor manufacturing processes:

• Inspection and Metrology: Light Engines provide uniform, well-controlled illumination in inspection and metrology systems. They provide consistent, service-free, long-lived brightness for detecting defects and measuring dimensions on semiconductor wafers and integrated circuit devices. Coherent sources are used in advanced inspection techniques, such as laser scanning microscopy, for detailed analysis of semiconductor materials and devices.

• Mask Aligners: Light Engines are used in mask aligners for photolithography processes. They provide the precise output needed for exposing photoresist-coated wafers, enabling the patterning of semiconductor devices.